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Optical microscope combined with the nanopipette-based quartz tuning fork-atomic force microscope for nanolithography
- Source :
- Proceedings of SPIE; September 2013, Vol. 8816 Issue: 1 p881608-881608-6
- Publication Year :
- 2013
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 8816
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs31223275
- Full Text :
- https://doi.org/10.1117/12.2036779