Lens heating impact analysis and controls for critical device layers by computational method

MLA

Conley, Will, et al. “Lens Heating Impact Analysis and Controls for Critical Device Layers by Computational Method.” Proceedings of SPIE, vol. 8683, no. 1, Apr. 2013, p. 86831Q–86831Q–8. EBSCOhost, https://doi.org/10.1117/12.2012135.

APA

Conley, W., Beak, D. H., Choi, J. P., Park, T., Nam, Y. S., Kang, Y. S., Park, C.-H., Park, K.-Y., Ryu, C.-H., Huang, W., & Baik, K.-H. (2013). Lens heating impact analysis and controls for critical device layers by computational method. Proceedings of SPIE, 8683(1), 86831Q–86831Q–8. https://doi.org/10.1117/12.2012135

Chicago

Conley, Will, Du Hyun Beak, Jin Phil Choi, Tony Park, Young Sun Nam, Young Seog Kang, Chan-Hoon Park, et al. 2013. “Lens Heating Impact Analysis and Controls for Critical Device Layers by Computational Method.” Proceedings of SPIE 8683 (1): 86831Q–86831Q–8. doi:10.1117/12.2012135.