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Probing limits of acoustic nanometrology using coherent extreme ultraviolet light
- Source :
- Proceedings of SPIE; April 2013, Vol. 8681 Issue: 1 p86810N-86810N-8, 781299p
- Publication Year :
- 2013
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 8681
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs31091635
- Full Text :
- https://doi.org/10.1117/12.2011194