Back to Search
Start Over
Effect of deposition conditions on the stoichiometry and structural properties of LiNbO3thin films deposited by MOCVD
- Source :
- Proceedings of SPIE; March 2013, Vol. 8626 Issue: 1 p862612-862612-8
- Publication Year :
- 2013
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 8626
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs31090750
- Full Text :
- https://doi.org/10.1117/12.2010105