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Deposition of TiN thin films on Si(100) by HCD ion plating
- Source :
- Surface and Coatings Technology; 2001, Vol. 140 Issue: 3 p206-214, 9p
- Publication Year :
- 2001
Details
- Language :
- English
- ISSN :
- 02578972
- Volume :
- 140
- Issue :
- 3
- Database :
- Supplemental Index
- Journal :
- Surface and Coatings Technology
- Publication Type :
- Periodical
- Accession number :
- ejs3030098
- Full Text :
- https://doi.org/10.1016/S0257-8972(01)01120-3