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Investigation of substoichiometric titanium nitride grown by unbalanced magnetron sputtering
- Source :
- Surface and Coatings Technology; 2000, Vol. 131 Issue: 1 p228-233, 6p
- Publication Year :
- 2000
Details
- Language :
- English
- ISSN :
- 02578972
- Volume :
- 131
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Surface and Coatings Technology
- Publication Type :
- Periodical
- Accession number :
- ejs3029617
- Full Text :
- https://doi.org/10.1016/S0257-8972(00)00828-8