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Photo-assisted metallisation: line resolution studies
- Source :
- Surface and Coatings Technology; 1998, Vol. 100 Issue: 1 p80-84, 5p
- Publication Year :
- 1998
Details
- Language :
- English
- ISSN :
- 02578972
- Volume :
- 100
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Surface and Coatings Technology
- Publication Type :
- Periodical
- Accession number :
- ejs3028320
- Full Text :
- https://doi.org/10.1016/S0257-8972(97)00592-6