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The reaction of Co and Si1-xGex for MOSFET with poly-Si1-xGex gate
- Source :
- Materials Chemistry and Physics; 2001, Vol. 69 Issue: 1 p84-88, 5p
- Publication Year :
- 2001
Details
- Language :
- English
- ISSN :
- 02540584
- Volume :
- 69
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Materials Chemistry and Physics
- Publication Type :
- Periodical
- Accession number :
- ejs3027337
- Full Text :
- https://doi.org/10.1016/S0254-0584(00)00385-0