Using the metal-oxide-polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality

Details

Language :

English

ISSN :

01694332

Volume :

63

Issue :

1

Database :

Supplemental Index

Journal :

Applied Surface Science

Publication Type :

Periodical

Accession number :

ejs2992347

Full Text :

https://doi.org/10.1016/0169-4332(93)90107-M