Investigation of Al-implanted 6H- and 4H-SiC layers after fast heating rate annealings

Details

Language :

English

ISSN :

01694332

Volume :

184

Issue :

1

Database :

Supplemental Index

Journal :

Applied Surface Science

Publication Type :

Periodical

Accession number :

ejs2992102

Full Text :

https://doi.org/10.1016/S0169-4332(01)00512-8