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Effects of the modified materials on plasma in surface modification by plasma

Authors :
Katoh, M.
Miyazaki, H.
Miyashita, K.
Ohi, S.
Tajima, K.
Ohte, T.
Kojima, A.
Ohtani, S.
Source :
Applied Surface Science; January 2001, Vol. 169 Issue: 1 p631-637, 7p
Publication Year :
2001

Details

Language :
English
ISSN :
01694332
Volume :
169
Issue :
1
Database :
Supplemental Index
Journal :
Applied Surface Science
Publication Type :
Periodical
Accession number :
ejs2991281
Full Text :
https://doi.org/10.1016/S0169-4332(00)00712-1