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Influence of oxygen partial pressure on transparency and conductivity of RF sputtered Al-doped ZnO thin films

Authors :
Tsuji, T.
Hirohashi, M.
Source :
Applied Surface Science; 2000, Vol. 157 Issue: 1-2 p47-51, 5p
Publication Year :
2000

Details

Language :
English
ISSN :
01694332
Volume :
157
Issue :
1-2
Database :
Supplemental Index
Journal :
Applied Surface Science
Publication Type :
Periodical
Accession number :
ejs2990601
Full Text :
https://doi.org/10.1016/S0169-4332(99)00517-6