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Influence of oxygen partial pressure on transparency and conductivity of RF sputtered Al-doped ZnO thin films
- Source :
- Applied Surface Science; 2000, Vol. 157 Issue: 1-2 p47-51, 5p
- Publication Year :
- 2000
Details
- Language :
- English
- ISSN :
- 01694332
- Volume :
- 157
- Issue :
- 1-2
- Database :
- Supplemental Index
- Journal :
- Applied Surface Science
- Publication Type :
- Periodical
- Accession number :
- ejs2990601
- Full Text :
- https://doi.org/10.1016/S0169-4332(99)00517-6