Fast ICCD imaging of KrF excimer laser induced titanium plasma plumes for silicon metallization

Details

Language :

English

ISSN :

01694332

Volume :

138

Issue :

1

Database :

Supplemental Index

Journal :

Applied Surface Science

Publication Type :

Periodical

Accession number :

ejs2989642

Full Text :

https://doi.org/10.1016/S0169-4332(98)00444-9