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Molecular layer epitaxy by real-time optical process monitoring

Authors :
Bachmann, K. J.
Hoepfner, C.
Sukidi, N.
Miller, A. E.
Harris, C.
Aspnes, D. E.
Dietz, N. A.
Tran, H. T.
Beeler, S.
Ito, K.
Source :
Applied Surface Science; 1997, Vol. 112 Issue: 1 p38-47, 10p
Publication Year :
1997

Details

Language :
English
ISSN :
01694332
Volume :
112
Issue :
1
Database :
Supplemental Index
Journal :
Applied Surface Science
Publication Type :
Periodical
Accession number :
ejs2988175
Full Text :
https://doi.org/10.1016/S0169-4332(96)00975-0