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Characterization of an ONO-stacked insulator film for a silicon micro-strip detector

Authors :
Okuno, S.
Ikeda, H.
Saitoh, Y.
Akamine, T.
Inoue, M.
Yamanaka, J.
Kadoi, K.
Kojima, Y.
Miyahara, S.-I.
Kamiya, M.
Source :
Nuclear Instruments and Methods in Physics Research Section A; 1997, Vol. 385 Issue: 2 p299-305, 7p
Publication Year :
1997

Details

Language :
English
ISSN :
01689002
Volume :
385
Issue :
2
Database :
Supplemental Index
Journal :
Nuclear Instruments and Methods in Physics Research Section A
Publication Type :
Periodical
Accession number :
ejs2968710
Full Text :
https://doi.org/10.1016/S0168-9002(96)01145-X