Back to Search Start Over

A comparative study of vacancies produced by proton implantation of silicon using positron annihilation and deep level transient spectroscopy

Authors :
Lourenco, M. A.
Knights, A. P.
Homewood, K. P.
Gwilliam, R. M.
Simpson, P. J.
Mascher, P.
Source :
Nuclear Instruments and Methods in Physics Research Section B; 2001, Vol. 175 Issue: 1 p300-304, 5p
Publication Year :
2001

Details

Language :
English
ISSN :
0168583X
Volume :
175
Issue :
1
Database :
Supplemental Index
Journal :
Nuclear Instruments and Methods in Physics Research Section B
Publication Type :
Periodical
Accession number :
ejs2950318
Full Text :
https://doi.org/10.1016/S0168-583X(00)00640-6