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High-fluence Co implantation in Si, SiO2/Si and Si3N4/Si - Part III: heavy-fluence Co bombardment induced surface topography development
- Source :
- Nuclear Instruments and Methods in Physics Research Section B; 1999, Vol. 159 Issue: 3 p158-165, 8p
- Publication Year :
- 1999
Details
- Language :
- English
- ISSN :
- 0168583X
- Volume :
- 159
- Issue :
- 3
- Database :
- Supplemental Index
- Journal :
- Nuclear Instruments and Methods in Physics Research Section B
- Publication Type :
- Periodical
- Accession number :
- ejs2949182
- Full Text :
- https://doi.org/10.1016/S0168-583X(99)00539-X