Back to Search Start Over

Properties of depth-profile controlled boron nitride films prepared by ion-beam assisted deposition

Authors :
Kumagai, M.
Suzuki, M.
Suzuki, T.
Tanaka, Y.
Setsuhara, Y.
Miyake, S.
Ogata, K.
Kohata, M.
Higeta, K.
Einishi, T.
Source :
Nuclear Instruments and Methods in Physics Research Section B; 1997, Vol. 127 Issue: 1 p977-980, 4p
Publication Year :
1997

Details

Language :
English
ISSN :
0168583X
Volume :
127
Issue :
1
Database :
Supplemental Index
Journal :
Nuclear Instruments and Methods in Physics Research Section B
Publication Type :
Periodical
Accession number :
ejs2946419
Full Text :
https://doi.org/10.1016/S0168-583X(97)00042-6