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Properties of depth-profile controlled boron nitride films prepared by ion-beam assisted deposition
- Source :
- Nuclear Instruments and Methods in Physics Research Section B; 1997, Vol. 127 Issue: 1 p977-980, 4p
- Publication Year :
- 1997
Details
- Language :
- English
- ISSN :
- 0168583X
- Volume :
- 127
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Nuclear Instruments and Methods in Physics Research Section B
- Publication Type :
- Periodical
- Accession number :
- ejs2946419
- Full Text :
- https://doi.org/10.1016/S0168-583X(97)00042-6