Back to Search
Start Over
Defect transformation under growth of submonolayer oxides on silicon surfaces at low temperatures
- Source :
- Microelectronic Engineering; 2001, Vol. 59 Issue: 1 p399-404, 6p
- Publication Year :
- 2001
Details
- Language :
- English
- ISSN :
- 01679317
- Volume :
- 59
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Microelectronic Engineering
- Publication Type :
- Periodical
- Accession number :
- ejs2932678
- Full Text :
- https://doi.org/10.1016/S0167-9317(01)00675-X