Effect of a thin Ta layer on the C49-C54 transition

MLA

Via, F.La, et al. “Effect of a Thin Ta Layer on the C49-C54 Transition.” Microelectronic Engineering, vol. 55, no. 1, Jan. 2001, pp. 123–28. EBSCOhost, https://doi.org/10.1016/S0167-9317(00)00437-8.

APA

Via, F. L., Mammoliti, F., Grimaldi, M. G., Quilici, S., & Meinardi, F. (2001). Effect of a thin Ta layer on the C49-C54 transition. Microelectronic Engineering, 55(1), 123–128. https://doi.org/10.1016/S0167-9317(00)00437-8

Chicago

Via, F. La, F. Mammoliti, M. G. Grimaldi, S. Quilici, and F. Meinardi. 2001. “Effect of a Thin Ta Layer on the C49-C54 Transition.” Microelectronic Engineering 55 (1): 123–28. doi:10.1016/S0167-9317(00)00437-8.