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Comparative Study of Low Temperature Polycrystalline Silicon Thin-Film Transistors Obtained by Various Crystallization Techniques for use in Active Matrix LCDs

Authors :
Pattyn, H.
Poortmans, J.
Debenest, P.
Caymax, M.
Source :
Microelectronic Engineering; 1992, Vol. 19 Issue: 1 p97-97, 1p
Publication Year :
1992

Details

Language :
English
ISSN :
01679317
Volume :
19
Issue :
1
Database :
Supplemental Index
Journal :
Microelectronic Engineering
Publication Type :
Periodical
Accession number :
ejs2930294
Full Text :
https://doi.org/10.1016/0167-9317(92)90400-L