Laser thermoreflectance for semiconductor thin films metrology

MLA

Gailly, P., et al. “Laser Thermoreflectance for Semiconductor Thin Films Metrology.” Proceedings of SPIE, vol. 8438, no. 1, May 2012, p. 84381F–84381F–9. EBSCOhost, https://doi.org/10.1117/12.922576.

APA

Gailly, P., Hastanin, J., Duterte, C., Hernandez, Y., Lecourt, J.-B., Kupisiewicz, A., Martin, P.-E., & Fleury-Frenette, K. (2012). Laser thermoreflectance for semiconductor thin films metrology. Proceedings of SPIE, 8438(1), 84381F–84381F–9. https://doi.org/10.1117/12.922576

Chicago

Gailly, P., J. Hastanin, C. Duterte, Y. Hernandez, J.-B. Lecourt, A. Kupisiewicz, P.-E. Martin, and K. Fleury-Frenette. 2012. “Laser Thermoreflectance for Semiconductor Thin Films Metrology.” Proceedings of SPIE 8438 (1): 84381F–84381F–9. doi:10.1117/12.922576.