Back to Search
Start Over
Characterization and application of a-SiCx:H films for the passivation of the c-Si surface
- Source :
- Thin Solid Films; 2002, Vol. 403 Issue: 1 p476-479, 4p
- Publication Year :
- 2002
Details
- Language :
- English
- ISSN :
- 00406090
- Volume :
- 403
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Thin Solid Films
- Publication Type :
- Periodical
- Accession number :
- ejs2750090
- Full Text :
- https://doi.org/10.1016/S0040-6090(01)01648-0