Optical, electrical and mechanical properties of nitrogen-rich carbon nitride films deposited by inductively coupled plasma chemical vapor deposition

Details

Language :

English

ISSN :

00406090

Volume :

377

Issue :

1

Database :

Supplemental Index

Journal :

Thin Solid Films

Publication Type :

Periodical

Accession number :

ejs2748636

Full Text :

https://doi.org/10.1016/S0040-6090(00)01316-X