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Reduction of intrinsic stress in cubic boron nitride films
- Source :
- Thin Solid Films; 1999, Vol. 341 Issue: 1 p238-245, 8p
- Publication Year :
- 1999
Details
- Language :
- English
- ISSN :
- 00406090
- Volume :
- 341
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Thin Solid Films
- Publication Type :
- Periodical
- Accession number :
- ejs2746793
- Full Text :
- https://doi.org/10.1016/S0040-6090(98)01766-0