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Reduction of intrinsic stress in cubic boron nitride films

Authors :
Ullmann, J.
Kellock, A. J.
Baglin, J. E. E.
Source :
Thin Solid Films; 1999, Vol. 341 Issue: 1 p238-245, 8p
Publication Year :
1999

Details

Language :
English
ISSN :
00406090
Volume :
341
Issue :
1
Database :
Supplemental Index
Journal :
Thin Solid Films
Publication Type :
Periodical
Accession number :
ejs2746793
Full Text :
https://doi.org/10.1016/S0040-6090(98)01766-0