Comparative study of the elastic properties of polycrystalline aluminum nitride films on silicon by Brillouin light scattering

Details

Language :

English

ISSN :

00406090

Volume :

310

Issue :

1

Database :

Supplemental Index

Journal :

Thin Solid Films

Publication Type :

Periodical

Accession number :

ejs2744999

Full Text :

https://doi.org/10.1016/S0040-6090(97)00343-X