Influence of microstructure on residual stress in tungsten thin films analyzed by X-ray diffraction

Details

Language :

English

ISSN :

00406090

Volume :

275

Issue :

1

Database :

Supplemental Index

Journal :

Thin Solid Films

Publication Type :

Periodical

Accession number :

ejs2743067

Full Text :

https://doi.org/10.1016/0040-6090(96)80096-4