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Atomic force microscopy study of the microroughness of SiC thin films
- Source :
- Thin Solid Films; 1994, Vol. 249 Issue: 1 p38-38, 1p
- Publication Year :
- 1994
Details
- Language :
- English
- ISSN :
- 00406090
- Volume :
- 249
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Thin Solid Films
- Publication Type :
- Periodical
- Accession number :
- ejs2741957
- Full Text :
- https://doi.org/10.1016/0040-6090(94)90082-5