Back to Search
Start Over
In and ex situ diagnostics of the growth of a-Ti thin films deposited by plasma-enhanced physical vapour deposition
- Source :
- Thin Solid Films; 1993, Vol. 228 Issue: 1 p117-117, 1p
- Publication Year :
- 1993
Details
- Language :
- English
- ISSN :
- 00406090
- Volume :
- 228
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Thin Solid Films
- Publication Type :
- Periodical
- Accession number :
- ejs2740853
- Full Text :
- https://doi.org/10.1016/0040-6090(93)90577-C