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In and ex situ diagnostics of the growth of a-Ti thin films deposited by plasma-enhanced physical vapour deposition

Authors :
Steffen, H.
Wulff, H.
Lunk, A.
Source :
Thin Solid Films; 1993, Vol. 228 Issue: 1 p117-117, 1p
Publication Year :
1993

Details

Language :
English
ISSN :
00406090
Volume :
228
Issue :
1
Database :
Supplemental Index
Journal :
Thin Solid Films
Publication Type :
Periodical
Accession number :
ejs2740853
Full Text :
https://doi.org/10.1016/0040-6090(93)90577-C