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Influence of Surface and Interface Properties on the Electrical Conductivity of Silicon Nanomembranes

Authors :
Zhao, Xiang Fu
Han, Ping
Scott, Shelley
Lagally, Max G.
Source :
Advanced Materials Research; November 2011, Vol. 383 Issue: 1 p7220-7223, 4p
Publication Year :
2011

Abstract

Electrical conductivity of silicon nanomembranes (SiNMs) was measured by van der Pauw method under two surface modifications: hydrofluoric acid (HF) treatment and vacuum-hydrogenated(VH) treatment, which create hydrogen-terminated surface; and one interface modification: forming gas (5% H2 in N2) anneal, which causes hydrogen passivated interfaces. The results show that thinner SiNMs are more sensitive to the surface modifications, and HF treatment can cause larger drop of sheet resistance than that caused by VH treatment probably because of Fluorine (F). Forming gas anneal can also improve the conductivity depending on the interface trap density.

Details

Language :
English
ISSN :
10226680
Volume :
383
Issue :
1
Database :
Supplemental Index
Journal :
Advanced Materials Research
Publication Type :
Periodical
Accession number :
ejs26461457
Full Text :
https://doi.org/10.4028/www.scientific.net/AMR.383-390.7220