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Unified analytic representation of physical sputtering yield
- Source :
- Journal of Nuclear Materials; 2001, Vol. 290 Issue: 1 p104-106, 3p
- Publication Year :
- 2001
Details
- Language :
- English
- ISSN :
- 00223115
- Volume :
- 290
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Journal of Nuclear Materials
- Publication Type :
- Periodical
- Accession number :
- ejs2619508
- Full Text :
- https://doi.org/10.1016/S0022-3115(00)00612-7