Oxygen concentration in Czochralski silicon crystals depending on silicon monoxide evaporation from boron doped silicon melts

Details

Language :

English

ISSN :

00220248

Volume :

192

Issue :

1

Database :

Supplemental Index

Journal :

Journal of Crystal Growth

Publication Type :

Periodical

Accession number :

ejs2576337

Full Text :

https://doi.org/10.1016/S0022-0248(98)00375-3