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The effects of oxygen impurity in TMA on AlGaAs layers grown by MOVPE

Authors :
Hata, M.
Takata, H.
Yako, T.
Fukuhara, N.
Source :
Journal of Crystal Growth; 1992, Vol. 124 Issue: 1 p427-427, 1p
Publication Year :
1992

Details

Language :
English
ISSN :
00220248
Volume :
124
Issue :
1
Database :
Supplemental Index
Journal :
Journal of Crystal Growth
Publication Type :
Periodical
Accession number :
ejs2570483
Full Text :
https://doi.org/10.1016/0022-0248(92)90495-5