Micromachining of polydimethylsiloxane induced by laser plasma EUV light

MLA

Torii, S., et al. “Micromachining of Polydimethylsiloxane Induced by Laser Plasma EUV Light.” Proceedings of SPIE, vol. 8077, no. 1, May 2011, pp. 807714-807714–16. EBSCOhost, https://doi.org/10.1117/12.887384.

APA

Torii, S., Makimura, T., Okazaki, K., Nakamura, D., Takahashi, A., Okada, T., Niino, H., & Murakami, K. (2011). Micromachining of polydimethylsiloxane induced by laser plasma EUV light. Proceedings of SPIE, 8077(1), 807714-807714–807716. https://doi.org/10.1117/12.887384

Chicago

Torii, S., T. Makimura, K. Okazaki, D. Nakamura, A. Takahashi, T. Okada, H. Niino, and K. Murakami. 2011. “Micromachining of Polydimethylsiloxane Induced by Laser Plasma EUV Light.” Proceedings of SPIE 8077 (1): 807714-807714–16. doi:10.1117/12.887384.