Simultaneous Vapor‐Phase Polymerization of PEDOT and a Siloxane into Organic/Inorganic Hybrid Thin Films

The co‐vaporization and simultaneous polymerization of EDOT and APTES on a FTS‐coated substrate resulting in a homogeneous PEDOT/ASSQ thin film is described. The physicochemical properties of the film, including surface hardness, solvent mechanical wear resistance, and resistance to scratch, were much better than those of pure PEDOT. A PEDOT/ASSQ hybrid film with homogeneous morphology resulted, as judged by AFM topography scans, surface roughness calculations, and SEM images. The ASSQ proportion in the hybrid films, as investigated by XPS and EDS, was strongly dependent on the content of FTS on the substrate. In addition, the simultaneous polymerization of a PEDOT/ASSQ hybrid film onto selective micropatterns was demonstrated and analyzed.