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Hartmann wave-front measurement at 13.4 nm with λ_EUV/120 accuracy
- Source :
- Optics Letters; September 2003, Vol. 28 Issue: 17 p1534-1536, 3p
- Publication Year :
- 2003
-
Abstract
- We report, for the first time to our knowledge, experimental demonstration of wave-front analysis via the Hartmann technique in the extreme ultraviolet range. The reference wave front needed to calibrate the sensor was generated by spatially filtering a focused undulator beam with 1.7- and 0.6-μm -diameter pinholes. To fully characterize the sensor, accuracy and sensitivity measurements were performed. The incident beam’s wavelength was varied from 7 to 25 nm. Measurements of accuracy better than λ_EUV/120 (0.11 nm) were obtained at λ_EUV=13.4 nm . The aberrations introduced by an additional thin mirror, as well as wave front of the spatially unfiltered incident beam, were also measured.
Details
- Language :
- English
- ISSN :
- 01469592 and 15394794
- Volume :
- 28
- Issue :
- 17
- Database :
- Supplemental Index
- Journal :
- Optics Letters
- Publication Type :
- Periodical
- Accession number :
- ejs20953611