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Substrate parameter determination for thin film spectrophotometric measurement correction

Authors :
Matzeu, M.
Panatta, A.
Source :
Applied Optics; April 1983, Vol. 22 Issue: 8 p1247-1250, 4p
Publication Year :
1983

Abstract

A method of obtaining accurate values for the optical parameters of thin film substrates is described. Calculations for reflected and transmitted fluxes in substrate sets are developed allowing for double reflection. A simple procedure to fit measurements is also illustrated. Values for substrate parameters are extracted and used to correct for substrate influence in thin film spectrophotometric measurements. Corrected thin film measurements and data calculated with obtained optical constants are compared.

Details

Language :
English
ISSN :
1559128X and 21553165
Volume :
22
Issue :
8
Database :
Supplemental Index
Journal :
Applied Optics
Publication Type :
Periodical
Accession number :
ejs20801224