Characterization of silicon transducers with Si3N4sensing surfaces by an AFM and a PAB system

MLA

Adami, Manuela, et al. “Characterization of Silicon Transducers with Si3N4sensing Surfaces by an AFM and a PAB System.” Sensors and Actuators B: Chemical, vol. 25, no. 1–3, Apr. 1995, pp. 889–93. EBSCOhost, https://doi.org/10.1016/0925-4005(95)85196-8.

APA

Adami, M., Alliata, D., Del Carlo, C., Martini, M., Piras, L., Sartore, M., & Nicolini, C. (1995). Characterization of silicon transducers with Si3N4sensing surfaces by an AFM and a PAB system. Sensors and Actuators B: Chemical, 25(1–3), 889–893. https://doi.org/10.1016/0925-4005(95)85196-8

Chicago

Adami, Manuela, Dario Alliata, Corrado Del Carlo, Mauro Martini, Luciana Piras, Marco Sartore, and Claudio Nicolini. 1995. “Characterization of Silicon Transducers with Si3N4sensing Surfaces by an AFM and a PAB System.” Sensors and Actuators B: Chemical 25 (1–3): 889–93. doi:10.1016/0925-4005(95)85196-8.