Optical performance evaluation of thin-film micromirror array in projection display

We perform computer simulation and experimental work to investigate how the surface topography of reflecting mirrors affects the optical performance of the thin-film micromirror array (TMA) designed for projection display. We reveal that the form accuracy of mirror surface specified by the peak to valley should be less than 0.3 m, so that the reflecting efficiency becomes more than 95. We also find that the micromirrors should be tilted in a diagonal mode so as to maximize the contrast ratio that is defined by the ratio of the maximum amount of through light to the minimum. © 2002 Society of Photo-Optical Instrumentation Engineers.