SiC-Based MOSFETs for Harsh Environment Emissions Sensors

Depletion-mode 4H-SiC FETs were fabricated for use as harsh environment gas sensors. To enable sensitivity to NOx, O2 and H2 gases, metal oxide catalysts such as InOx were integrated into the gate of the device. The FETs had a total area of approximately 1 mm2. Devices with various gate widths and lengths were fabricated and tested, with sensor performance of 5% or greater in current change from the baseline resulting from designs having a length to width ratio of around 50.