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Delamination of Thin Layers in H+ Implanted Silicon Carbide
- Source :
- Materials Science Forum; February 1998, Vol. 264 Issue: 1 p771-774, 4p
- Publication Year :
- 1998
-
Abstract
- Not Available
Details
- Language :
- English
- ISSN :
- 02555476 and 16629752
- Volume :
- 264
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Materials Science Forum
- Publication Type :
- Periodical
- Accession number :
- ejs20083298
- Full Text :
- https://doi.org/10.4028/www.scientific.net/MSF.264-268.771