IntriX: a numerical model for electron probe analysis at high depth resolution. Part II—tests and confrontation with experiments

The model called IntriX, designed to interpret quantitatively electron probe analysis data, was tested via confrontations between its results and experimental or Monte Carlo data. These confrontations were established for in-depth ionization distributions Φ(ρz) and characteristic x-ray relative intensities in cases of homogeneous and stratified samples, and for wide ranges of incident beam energies (1.15&lt;E<INF>0</INF>&lt;30 keV) and overvoltages (1.3&lt;E<INF>0</INF>/E<INF>S</INF>&lt;10). Measurements are presented that allow the performance of IntriX to be tested in the low-energy range (E<INF>0</INF>&lt;5 keV). © 1998 John Wiley & Sons, Ltd.