A CMOS Range Camera based on Single Photon Avalanche Diodes (CMOS-Range-Kamera mit Single-Photon-Avalanche-Photodioden)

This paper reports on a novel range camera employing Single Photon Avalanche Diodes for Time-of-Flight imaging applications. The architecture of an active pixel containing a single photon detector and the relative read-out channel is presented together with experimental results of a 64-pixel linear array. The sensor array, fabricated with a standard high-voltage 0.8-µm CMOS technology, exhibits a range accuracy of better than ± 3cm in the range interval 2m to 5m, without any external averaging operation.