Properties of PEG, PPG and Their Copolymers: Influence on Copper Filling of Damascene Interconnects.

MLA

Ryan, Kevin, et al. “Properties of PEG, PPG and Their Copolymers: Influence on Copper Filling of Damascene Interconnects.” Journal of The Electrochemical Society, vol. 160, no. 12, Dec. 2013, pp. D3186–96. EBSCOhost, https://doi.org/10.1149/2.033312jes.

APA

Ryan, K., Dunn, K., van Eisden, J., & Adolf, J. (2013). Properties of PEG, PPG and Their Copolymers: Influence on Copper Filling of Damascene Interconnects. Journal of The Electrochemical Society, 160(12), D3186–D3196. https://doi.org/10.1149/2.033312jes

Chicago

Ryan, Kevin, Kathleen Dunn, Jobert van Eisden, and James Adolf. 2013. “Properties of PEG, PPG and Their Copolymers: Influence on Copper Filling of Damascene Interconnects.” Journal of The Electrochemical Society 160 (12): D3186–96. doi:10.1149/2.033312jes.