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Transient Effect Assisted NBTI Degradation in p-Channel LTPS TFTs under Dynamic Stress.

Authors :
Chia-Sheng Lin
Ying-Chung Chen
Ting-Chang Chang
Hung-Wei Li
Shih-Ching Chen
Wei-Che Hsu
Fu-Yen Jian
Te-Chih Chen
Ya-Hsiang Tai
Source :
Journal of The Electrochemical Society; 2011, Vol. 158 Issue 1, pH10-H14, 5p
Publication Year :
2011

Abstract

This work investigates dynamic negative bias temperature instability (NBTI) in p-channel low-temperature polycrystalline silicon thin-film transistors (LTPS TFTs) with different rise and fall times. Experimental results reveal identical increases in the interface state density (N<subscript>it</subscript>) induced by different dynamic NBTI stress conditions. Nevertheless, the degradation of the grain boundary trap (Nt<subscript>rap</subscript>) becomes more significant as rise time decreases to 1 μs. Because the surface inversion layer cannot form during the short rise time, transient bulk voltage will cause excess holes to diffuse into the poly-Si bulk. Therefore, the significant N<subscript>trap</subscript> increase is assisted by this transient effect. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
00134651
Volume :
158
Issue :
1
Database :
Supplemental Index
Journal :
Journal of The Electrochemical Society
Publication Type :
Academic Journal
Accession number :
62993010
Full Text :
https://doi.org/10.1149/1.3507253