Role of Gas Doping Sequence in Surface Reactions and Dopant Incorporation during Atomic Layer Deposition of Al-Doped ZnO.

Details

Language :

English

ISSN :

08974756

Volume :

21

Issue :

23

Database :

Supplemental Index

Journal :

Chemistry of Materials

Publication Type :

Academic Journal

Accession number :

45576823

Full Text :

https://doi.org/10.1021/cm901404p