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Nanostructured Films on Silicon Surfaces.
- Source :
- Functional Properties of Nanostructured Materials; 2006, p229-255, 27p
- Publication Year :
- 2006
-
Abstract
- This contribution addresses the formation of ultrathin films on silicon surfaces: Metallic films, oxides and nitrides, and aluminum oxide and nitride, and their properties. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISBNs :
- 9781402045950
- Database :
- Supplemental Index
- Journal :
- Functional Properties of Nanostructured Materials
- Publication Type :
- Book
- Accession number :
- 33168581
- Full Text :
- https://doi.org/10.1007/1-4020-4594-8_16