Deposition of Pr- and Nd-aluminate by Liquid Injection MOCVD and ALD Using Single-Source Heterometallic Alkoxide Precursors.

Details

Language :

English

ISSN :

08974756

Volume :

19

Issue :

19

Database :

Supplemental Index

Journal :

Chemistry of Materials

Publication Type :

Academic Journal

Accession number :

26587962

Full Text :

https://doi.org/10.1021/cm0707556