Enhanced Oxidation Resistance and Interface Stability of Atomic-Layer-Deposited MoNx Electrodes via TiN Passivation for DRAM Cell Capacitor Applications.

Details

Language :

English

ISSN :

19448244

Volume :

16

Issue :

42

Database :

Supplemental Index

Journal :

ACS Applied Materials & Interfaces

Publication Type :

Academic Journal

Accession number :

180454995

Full Text :

https://doi.org/10.1021/acsami.4c14077