Analysis of Heterostructure Formation of Abnormally Oriented Grains in Sputter-Deposited AlScN Films and Its Impact on Bulk Acoustic Wave Devices.

Details

Language :

English

ISSN :

19448244

Volume :

16

Issue :

39

Database :

Supplemental Index

Journal :

ACS Applied Materials & Interfaces

Publication Type :

Academic Journal

Accession number :

180093477

Full Text :

https://doi.org/10.1021/acsami.4c07539